At the SPIE advanced lithography conference in San Jose, CA, imec presented breakthrough results on Directed Self-Assembly (DSA) process development. Together with semiconductor equipment supplier Tokyo Electron and Merck, a leading chemical and pharmaceutical company that acquired AZ Electronic Materials in May 2014, imec has significantly improved DSA defectivity in the past year, approaching single-digit values.   Additionally, the partners have developed a DSA solution for a via patterning...